Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Etch rate enhancement for a silicon etch process through etch chamber pretreatment

Etch rate enhancement for a silicon etch process through etch chamber pretreatment

US Patent 9711365 · Granted Jul 18, 2017

Estimated economic value: $2,009,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Structural body, system, and structural product2025
Illumination unit2025
Percolation doping of inorganic-organic frameworks for multiple device applicati2024
Nonaqueous electrolyte secondary battery2023
Autonomous vehicle operation device2023
Wavelength converter2023
Joint support unit and walking support apparatus2022
Plant operational plan optimization discrete event simulator device and method2022
Compressor wheel and supercharger2022
Cylindrical nonaqueous electrolyte secondary battery2022
Wavelength conversion member2021
Liquid supply device and liquid ejecting apparatus2021