Charged particle-beam device

Assignee

• Hitachi High-Technologies

Inventors

• Akira Ikegami (55 patents)
• Hideto Dohi (14 patents)
• Hideyuki Kazumi (74 patents)
• Yoichi Ose (72 patents)
• Naomasa Suzuki (54 patents)
• Unknown
• Ryuji Nishi (2 patents)
• Akio Takaoka (1 patents)

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