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Home › Exposure activated chemically amplified directed self-assembly (DSA) for back end of line (BEOL) pattern cutting and plugging

Exposure activated chemically amplified directed self-assembly (DSA) for back end of line (BEOL) pattern cutting and plugging

US Patent 9625815 · Granted Apr 18, 2017

Estimated economic value: $8,310,000 ⓘ

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