Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Arc chamber with multiple cathodes for an ion source

Arc chamber with multiple cathodes for an ion source

US Patent 9620326 · Granted Apr 11, 2017

Estimated economic value: $2,677,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods for preparing void-free coatings for plasma treatment components2024
Systems and methods for a narrow band high transmittance interference filter2023
Polishing pad, method for manufacturing polishing pad, and polishing method2023
Systems and methods for a narrow band high transmittance interference filter2021
Semiconductor device having etching control layer in substrate and method of fab2020
Layout design for fanout patterns in self-aligned double patterning process2019
Light-emitting device2019
Polishing pad, method for manufacturing polishing pad, and polishing method2019
Interconnect structure and fabricating method thereof2018
Digital wireless data collection2018
Method for sealing processing module2018
Systems and methods for a narrow band high transmittance interference filter2017