Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9620326 | Arc chamber with multiple cathodes for an ion source | Chin-Tsung Lin, Hsiao-Yin HSIEH, Chi-Hao Huang, Yeh-Chieh Wang | 2017-04-11 |
| 7175951 | Two mask in-situ overlay checking method | — | 2007-02-13 |