Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Exposure apparatus, exposure method, and device manufacturing method

Exposure apparatus, exposure method, and device manufacturing method

US Patent 9575413 · Granted Feb 21, 2017

Estimated economic value: $23,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for analyzing additively manufactured object, and method an2025
Processing system, processing method, measurement apparatus, substrate processin2024
Method of determining set of sample shot regions, method of obtaining measuremen2024
Measuring method of residual stress distribution, calculating method of same, an2024
Processing system, processing method, measurement apparatus, substrate processin2023
Alignment apparatus, alignment method, lithography apparatus, and method of manu2022
Measurement apparatus, exposure apparatus, and method of manufacturing article2021
Pattern forming apparatus, deciding method, storage medium, information processi2020
Measurement method, measurement apparatus, lithography apparatus, and method of 2019
Plating method2019
Lithography apparatus and article manufacturing method2019
Measurement apparatus, lithography apparatus, and method of manufacturing articl2019