Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9575413 | Exposure apparatus, exposure method, and device manufacturing method | Takuro Tsujikawa, Atsushi Kawahara, Shinichi Egashira | 2017-02-21 |
| 7692763 | Exposure apparatus | Takeo Kihara | 2010-04-06 |