Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12140878 | Processing system, processing method, measurement apparatus, substrate processing apparatus and article manufacturing method | — | 2024-11-12 |
| 12025924 | Method of determining set of sample shot regions, method of obtaining measurement value, information processing apparatus, lithography apparatus, storage medium, and article manufacturing method | — | 2024-07-02 |
| 11726412 | Processing system, processing method, measurement apparatus, substrate processing apparatus and article manufacturing method | — | 2023-08-15 |
| 11360401 | Alignment apparatus, alignment method, lithography apparatus, and method of manufacturing article | Genki Murayama | 2022-06-14 |
| 11067908 | Measurement apparatus, exposure apparatus, and method of manufacturing article | — | 2021-07-20 |
| 10831116 | Pattern forming apparatus, deciding method, storage medium, information processing apparatus, and article manufacturing method | — | 2020-11-10 |
| 10185235 | Measurement apparatus, lithography apparatus, and method of manufacturing article | — | 2019-01-22 |
| 10185225 | Lithography apparatus and article manufacturing method | — | 2019-01-22 |
| 9575413 | Exposure apparatus, exposure method, and device manufacturing method | Takuro Tsujikawa, Atsushi Kawahara, Issei Funayoshi | 2017-02-21 |
| 9524528 | Management apparatus and management method | Hiroshi Nogawa, Hirofumi IZUMI, Motoki DAI, Shinichi Kawahara, Shuichiro Suetsugu | 2016-12-20 |
| 8518614 | Mark position detection apparatus | — | 2013-08-27 |
| 8107051 | Exposure apparatus with improved alignment mark position measurement condition setting feature, and device manufacturing method using the same | — | 2012-01-31 |
| 7921238 | USB host system and method for transferring transfer data | Ryo Sakai | 2011-04-05 |
| 7764357 | Exposure apparatus and device manufacturing method | — | 2010-07-27 |