Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460433 | Measurement method, measurement apparatus, lithography apparatus, and method of manufacturing article | — | 2019-10-29 |
| 10120294 | Lithography apparatus and article manufacturing method | — | 2018-11-06 |
| 10095124 | Detection apparatus, lithography apparatus, method of manufacturing article, and detection method | — | 2018-10-09 |
| 9575413 | Exposure apparatus, exposure method, and device manufacturing method | Atsushi Kawahara, Issei Funayoshi, Shinichi Egashira | 2017-02-21 |
| 8339570 | Mark position detection device and mark position detection method, exposure apparatus using same, and device manufacturing method | — | 2012-12-25 |