Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11360401 | Alignment apparatus, alignment method, lithography apparatus, and method of manufacturing article | Shinichi Egashira | 2022-06-14 |
| 11249401 | Position detection apparatus, position detection method, lithography apparatus, and method of manufacturing article | — | 2022-02-15 |
| 10943343 | Evaluation method, determination method, lithography apparatus, and non-transitory computer-readable storage medium | — | 2021-03-09 |
| 10611063 | Imprint apparatus, and method of manufacturing article | — | 2020-04-07 |