Cyclic aluminum nitride deposition in a batch reactor

Assignee

• Asm Ip Holding B.V.

Inventors

• Werner Knaepen (34 patents)
• Bert Jongbloed (41 patents)
• Dieter Pierreux (47 patents)
• Peter Zagwijn (4 patents)
• Hessel Sprey (15 patents)
• Cornelius A. van der Jeugd (24 patents)
• Marinus De Blank (6 patents)
• Robin Roelofs (4 patents)
• Qi Xie (92 patents)
• Jan Willem Maes (103 patents)

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