Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Charged particle beam writing apparatus and charged particle beam writing method

Charged particle beam writing apparatus and charged particle beam writing method

US Patent 9472372 · Granted Oct 18, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Charged particle beam writing apparatus, charged particle beam writing method an2025
Method of producing hydrofluoroolefin2024
Photoelectric-surface electron source2024
Multi-charged-particle-beam writing method, multi-charged-particle-beam writing 2024
Electron beam irradiation apparatus and electron beam irradiation method2023
Multiple electron beam writing apparatus and multiple electron beam writing meth2023
Method for controlling operation of electron emission source, electron beam writ2023
Drawing apparatus and control method thereof2022
Charged particle beam writing apparatus and charged particle beam writing method2022
Display2020
Planar lighting device2020
Method for isomerizing organic compound, and method for producing isomer of orga2020