Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of manufacturing a projection objective and projection objective

Method of manufacturing a projection objective and projection objective

US Patent 9360775 · Granted Jun 7, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Projection exposure apparatus for semiconductor lithography2025
Projection objective including an optical device2025
Facet assembly for a facet mirror2025
Optical arrangement with an overview function for a catadioptric microscope obje2025
Support for an optical element2025
Stop, optical system and lithography apparatus2025
Mirror, in particular for a microlithographic projection exposure apparatus2025
Imaging optical arrangement to image an object illuminated by X-rays2024
Optical diffraction component2024
Method and device for characterizing the surface shape of an optical element2024
Apparatus and method for characterizing a microlithographic mask2024
Projection exposure method and projection lens with setting of the pupil transmi2024