Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Wafer handling systems and methods

Wafer handling systems and methods

US Patent 9281222 · Granted Mar 8, 2016

Estimated economic value: $13,282,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods and systems for temperature control for a substrate2025
Method of assembling drift tube assemblies in ion implantors2025
Instrument for medical diagnosis2025
Volume filling cassette for load lock2025
Substrate transfer systems and methods of use thereof2025
Workpiece handling architecture for high workpiece throughput2025
Workpiece handling architecture for high workpiece throughput2025
Workpiece handling architecture for high workpiece throughput2025
Workpiece handling architecture for high workpiece throughput2025
Methods and apparatus for processing a substrate2025
Linear accelerator assembly including flexible high-voltage connection2025
Electronic device manufacturing system2025