Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › 2D programmable aperture mechanism

2D programmable aperture mechanism

US Patent 9255887 · Granted Feb 9, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Pneumatic controlled flexure system for stabilizing a projection device2025
Plasma cell for providing VUV filtering in a laser-sustained plasma light source2021
Self aligning systems and methods for lithography systems2020
System and method for electrodeless plasma ignition in laser-sustained plasma li2019
Plasma cell for providing VUV filtering in a laser-sustained plasma light source2018
Flexible optical aperture mechanisms2017
Method and apparatus to reduce thermal stress by regulation and control of lamp 2017
Wafer and reticle inspection systems and methods for selecting illumination pupi2016
Wafer and reticle inspection systems and methods for selecting illumination pupi2016
Diode laser based broad band light sources for wafer inspection tools2015
Diode laser based broad band light sources for wafer inspection tools2014
Recirculation high purity system for protecting optical modules or inspection sy2013