Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Diode laser based broad band light sources for wafer inspection tools

Diode laser based broad band light sources for wafer inspection tools

US Patent 9110037 · Granted Aug 18, 2015

Estimated economic value: $9,388,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Pneumatic controlled flexure system for stabilizing a projection device2025
Window variability correction in additive manufacturing2025
Stereolithography apparatus with individually addressable light source arrays2021
Window variability correction in additive manufacturing2021
Plasma cell for providing VUV filtering in a laser-sustained plasma light source2021
Plasma cell for providing VUV filtering in a laser-sustained plasma light source2021
Self aligning systems and methods for lithography systems2020
Broadband light source including transparent portion with high hydroxide content2019
Laser sustained plasma light source with graded absorption features2019
System and method for laser-sustained plasma illumination2019
System and method for electrodeless plasma ignition in laser-sustained plasma li2019
System and method for electrodeless plasma ignition in laser-sustained plasma li2019