Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Recirculation high purity system for protecting optical modules or inspection system during storage, transport and shipping

Recirculation high purity system for protecting optical modules or inspection system during storage, transport and shipping

US Patent 8414688 · Granted Apr 9, 2013

Estimated economic value: $24,090,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Protection of optical materials of optical components from radiation degradation2025
Pneumatic controlled flexure system for stabilizing a projection device2025
Material recovery systems for optical components2023
Differential height measurement using interstitial mirror plate2023
System and method for optical-path coupling of light for in-situ photochemical c2023
Plasmonic photocathode emitters at ultraviolet and visible wavelengths2022
Laser produced plasma light source having a target material coated on a cylindri2022
Boron-based capping layers for EUV optics2022
System and method for protecting optics from vacuum ultraviolet light2022
Plasmonic photocathode emitters2022
Vacuum actuator containment for molecular contaminant and particle mitigation2021
Plasma cell for providing VUV filtering in a laser-sustained plasma light source2021