{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Electrostatic chuck assembly", "item": "https://www.patentleaderboard.com/patent/9117867"}]}
Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Electrostatic chuck assembly

Electrostatic chuck assembly

US Patent 9117867 · Granted Aug 25, 2015

Estimated economic value: $10,519,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods for calibrating an optical emission spectrometer2025
Systems and methods for streamlining healthcare equipment rentals2025
Film thickness uniformity improvement using edge ring and bias electrode geometr2025
Edge ring2024
Ceramic coated quartz lid for processing chamber2024
Methods for calibrating an optical emission spectrometer2024
Method and apparatus for selective nitridation process2023
Semiconductor chamber coatings and processes2023
Ceramic coated quartz lid for processing chamber2022
Inductive plasma source with metallic shower head using b-field concentrator2022
Film thickness uniformity improvement using edge ring and bias electrode geometr2022
Plasma processing system workpiece carrier with thermally isolated heater plate 2022