Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Polarity control for remote plasma

Polarity control for remote plasma

US Patent 9117855 · Granted Aug 25, 2015

Estimated economic value: $10,519,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Extreme uniformity heated substrate support assembly2025
Ion extraction optics having non uniform grid assembly2025
System architecture of manufacturing of semiconductor wafers2025
Semiconductor processing chamber for improved precursor flow2025
Semiconductor processing chamber for improved precursor flow2025
Cylindrical cavity with impedance shifting by irises in a power-supplying wavegu2025
Cylindrical cavity with impedance shifting by irises in a power-supplying wavegu2025
Systems and methods for detecting failure of spring contacts2025
Metal oxide resist patterning with electrical field guided post-exposure bake2025
Chamber and methods of treating a substrate after exposure to radiation2024
Flow control features of CVD chambers2024
Flow control features of CVD chambers2024