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Home › Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

US Patent 8885147 · Granted Nov 11, 2014

Estimated economic value: $5,197,000 ⓘ

Assignee

Asml Netherlands B.V.

Inventors

Michael Johannes Vervoordeldonk (10 patents)
Ronald Casper Kunst (9 patents)
Youssef Karel Maria De Vos (15 patents)
Johannes Hubertus Antonius Van De Rijdt (26 patents)
Robertus Jacobus Theodorus Van Kempen (4 patents)

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