Assignee
- National University Orporation Tokyo University Of Agriculture And Technology
- Rohm Co.
- Tokyo Electron Limited
Inventors
- Akinori Koukitu (32 patents)
- Yoshinao Kumagai (23 patents)
- Tetsuo Fujii (126 patents)
- Naoki Yoshii (8 patents)
US Patent 8822263 · Granted Sep 2, 2014