Leaf spring, stage system, and lithographic apparatus

Assignee

• Asml Netherlands B.V.

Inventors

• Christiaan Alexander Hoogendam (192 patents)
• Martinus Agnes Willem Cuijpers (15 patents)
• Bart Friso Riedstra (2 patents)
• Ronald Cornelis Gerardus Gijzen (3 patents)
• Maikel Cornelis Andreas Bruin (1 patents)

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