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Home › Etching high K dielectrics with high selectivity to oxide containing layers at elevated temperatures with BC13 based etch chemistries

Etching high K dielectrics with high selectivity to oxide containing layers at elevated temperatures with BC13 based etch chemistries

US Patent 8722547 · Granted May 13, 2014

Estimated economic value: $10,757,000 ⓘ

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