Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Robot for in-vacuum use

Robot for in-vacuum use

US Patent 8614786 · Granted Dec 24, 2013

Estimated economic value: $14,350,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Pod handling systems and methods for a lithographic device2025
Vessel for a radiation source2024
Radioisotope production2021
Multi-filament heater assembly2021
Mask assembly2021
Pellicle attachment apparatus2021
Pellicle attachment apparatus2021
Mask assembly2020
Pellicle attachment apparatus2020
Rapid exchange device for lithography reticles2018
Rapid exchange device for lithography reticles2018
Lithographic apparatus and device manufacturing method2017