Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Mask pattern correction device, method of correcting mask pattern, light exposure correction device, and method of correcting light exposure

Mask pattern correction device, method of correcting mask pattern, light exposure correction device, and method of correcting light exposure

US Patent 8553198 · Granted Oct 8, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Memory system and method for controlling the same2025
Shielding gas for mag welding, mag welding method, and welded structure2019
Apparatus and method for quantitative evaluation of braze bonding length with us2017
Steam turbine and steam turbine blade2016
Welding inspection method and apparatus thereof2015
Image processing apparatus2015
Data generation method for semiconductor device, and electron beam exposure syst2013
Pattern forming method and method for manufacturing semiconductor device2013
Apparatus for manufacturing a photomask2012
Mask pattern correction device, method of correcting mask pattern, light exposur2012
Mask pattern correction device, method of correcting mask pattern, light exposur2012
Mask pattern correction device, method of correcting mask pattern, light exposur2012