Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Data generation method for semiconductor device, and electron beam exposure system

Data generation method for semiconductor device, and electron beam exposure system

US Patent 8429573 · Granted Apr 23, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Analyzer and display method2025
Electrophoresis system and electrophoresis analysis method2025
Memory system and method for controlling the same2025
Image processing apparatus2015
Mask pattern correction device, method of correcting mask pattern, light exposur2013
Exposure method and method of making a semiconductor device2012
Mask pattern correction device, method of correcting mask pattern, light exposur2012
Exposure method using charged particle beam2012
Preparing data for hybrid exposure using both electron beam exposure and reticle2012
Preparing data for hybrid exposure using both electron beam exposure and reticle2012
Semiconductor device manufacturing method, data generating apparatus, data gener2012
Captured image recording apparatus, captured image recording method, captured im2011