Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Measurement tool monitoring using fleet measurement precision and tool matching precision analysis

Measurement tool monitoring using fleet measurement precision and tool matching precision analysis

US Patent 8467993 · Granted Jun 18, 2013

Estimated economic value: $7,677,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Carboxylic acid loaded salt carrier and the method for producing thereof2025
Method and system for planning metrology measurements2019
Metrology management2017
Methods and systems involving measuring complex dimensions of silicon devices2014
Methods and systems involving measuring complex dimensions of silicon devices2014
SEM repair for sub-optimal features2013
Specimen handling apparatus2013
Alignment of wafers for 3D integration2012
SEM repair for sub-optimal features2012
Automated dynamic metrology sampling system and method for process control2011
Reducing contamination in immersion lithography2011
Offset determination method for measurement system matching2010