Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Calibration method and lithographic apparatus for calibrating an optimum take over height of a substrate

Calibration method and lithographic apparatus for calibrating an optimum take over height of a substrate

US Patent 8384882 · Granted Feb 26, 2013

Estimated economic value: $6,348,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of unloading an object from a support table2023
Support table for a lithographic apparatus, lithographic apparatus and device ma2023
Method of unloading an object from a support table2022
Extraction body for lithographic apparatus2022
Lithographic apparatus, support table for a lithographic apparatus and device ma2022
Method of unloading an object from a support table2021
Support apparatus, lithographic apparatus and device manufacturing method2020
Support table for a lithographic apparatus, lithographic apparatus and device ma2020
Extraction body for lithographic apparatus2020
Substrate support, method for loading a substrate on a substrate support locatio2020
Substrate support, method for loading a substrate on a substrate support locatio2020
Lithographic apparatus, support table for a lithographic apparatus and device ma2019