{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Substrate holder and plating apparatus", "item": "https://www.patentleaderboard.com/patent/8337680"}]}

Home › Substrate holder and plating apparatus

Substrate holder and plating apparatus

US Patent 8337680 · Granted Dec 25, 2012

Assignee

Ebara

Inventors

Junichiro Yoshioka (26 patents)
Kuniaki Horie (26 patents)
Yugang Guo (12 patents)
Satoshi Morikami (8 patents)

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