Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic apparatus, device manufacturing method and position control method

Lithographic apparatus, device manufacturing method and position control method

US Patent 8330940 · Granted Dec 11, 2012

Estimated economic value: $6,873,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Lithographic apparatus having a chuck with a visco-elastic damping layer2015
Servo control system, lithographic apparatus and control method2014
Lithographic apparatus having a substrate support with open cell plastic foam pa2013
Lithographic apparatus, stage apparatus and device manufacturing method2013
Lithographic apparatus and methods for compensating substrate unflatness, determ2013
Device manufacturing method, method for holding a patterning device and lithogra2011
Lithographic apparatus and device manufacturing method2011
Lithographic apparatus and device manufacturing method2010
Lithographic apparatus and device manufacturing method2010
Lithographic apparatus and device manufacturing method2009
Lithographic apparatus and exposure method2009
Stage apparatus, lithographic apparatus and device manufacturing method2008