{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Purging of porogen from UV cure chamber", "item": "https://www.patentleaderboard.com/patent/8282768"}]}
Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Purging of porogen from UV cure chamber

Purging of porogen from UV cure chamber

US Patent 8282768 · Granted Oct 9, 2012

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Optical registration in a computer-aided system2025
Method and apparatuses for reducing porogen accumulation from a UV-cure chamber2021
Method and apparatuses for reducing porogen accumulation from a UV-cure chamber2021
Method and apparatuses for reducing porogen accumulation from a UV-cure chamber2021
Method and apparatuses for reducing porogen accumulation from a UV-cure chamber2021
Apparatus and methods for uniformly forming porous semiconductor on a substrate2020
Temperature controlled showerhead2020
High power low pressure UV bulb with plasma resistant coating2019
Clean resistant windows for ultraviolet thermal processing2019
Clean resistant windows for ultraviolet thermal processing2019
Substrate used for III-V-nitride growth and manufacturing method thereof2019
Temperature controlled showerhead2019