Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma processing apparatus of substrate and plasma processing method thereof

Plasma processing apparatus of substrate and plasma processing method thereof

US Patent 8252193 · Granted Aug 28, 2012

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Steering wheel for vehicles2025
Reading apparatus and reading method2024
Code reading device, program recording medium, code reading system, and code rea2024
Plasma processing apparatus and plasma processing method2024
Plasma processing apparatus and plasma processing method2024
Method for producing hetero-type monodisperse polyethylene glycol derivative2024
Memory protection circuit and memory protection method2023
Tracking device, tracking method, and tracking system2023
Time management system, server, and control method thereof2023
Etching method, semiconductor manufacturing apparatus, and method of manufacturi2023
Semiconductor memory device2023
Gas sensor2023