Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Semiconductor manufacturing device and method for manufacturing semiconductor devices

Semiconductor manufacturing device and method for manufacturing semiconductor devices

US Patent 8197638 · Granted Jun 12, 2012

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Semiconductor device and method for manufacturing semiconductor device2025
Substrate processing apparatus, quartz reaction tube and method of manufacturing2023
Substrate processing apparatus, method of manufacturing semiconductor device, an2020
Heating apparatus, substrate processing apparatus employing the same, method of 2015
Substrate stage of substrate processing apparatus and substrate processing appar2015
Substrate processing apparatus and manufacturing method for a semiconductor devi2015
Semiconductor producing device and semiconductor device producing method2014
Semiconductor producing device and semiconductor device producing method2014
Heating apparatus, substrate processing apparatus, and method of manufacturing s2012
Substrate processing apparatus, heating apparatus for use in the same, method of2011
Semiconductor producing device and semiconductor device producing method2010
Semiconductor producing device and semiconductor device producing method2010