Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structure

Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structure

US Patent 7863204 · Granted Jan 4, 2011

Estimated economic value: $83,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Vehicle traveling performance control function simulation apparatus2025
Semiconductor device and method for manufacturing semiconductor device2025
Permanent magnet-type rotary electric machine2025
Vehicle cooling device2025
Data transfer device, data processing device and data processing method2025
Common mode choke coil2025
Measuring device2025
Magnetic-geared motor with divisional spacers2025
Transfer processing device2025
Organopolysiloxane composition for use in release paper or release film2025
Stator with stator magnet, magnetic body, fixing member, and coil disposed in sl2024
Stator with slots having cooling portions between coils and magnets installed th2024