Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Use of design information and defect image information in defect classification

Use of design information and defect image information in defect classification

US Patent 8175373 · Granted May 8, 2012

Estimated economic value: $24,046,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Metrology method, target and substrate2025
Computational wafer inspection2024
Metrology method, target and substrate2022
Sample imaging apparatus2022
Sample imaging apparatus2022
Metrology method, target and substrate2021
Computational wafer inspection2021
Metrology method, target and substrate2020
Computational wafer inspection2020
Fluorescence reading device2019
Metrology method, target and substrate2019
Solid-state laser device and photoacoustic measurement device2019