Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate cleaning method, substrate cleaning apparatus and computer readable recording medium

Substrate cleaning method, substrate cleaning apparatus and computer readable recording medium

US Patent 8113221 · Granted Feb 14, 2012

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Gas cluster processing device and gas cluster processing method2024
Substrate processing apparatus and substrate processing method2024
Etching method and apparatus2023
Etching method and etching apparatus2023
Polyether polyol production method and polyurethane foam production method2022
Substrate cleaning method, substrate cleaning system, and memory medium2022
Gas cluster processing device and gas cluster processing method2022
Method of etching silicon-containing film, computer-readable storage medium, and2021
Etching method2021
Substrate cleaning apparatus, substrate cleaning system, substrate cleaning meth2021
Substrate processing method2020
Substrate cleaning method, substrate cleaning system, and memory medium2020