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Home › Computer-implemented methods, computer-readable media, and systems for identifying one or more optical modes of an inspection system as candidates for use in inspection of a layer of a wafer

Computer-implemented methods, computer-readable media, and systems for identifying one or more optical modes of an inspection system as candidates for use in inspection of a layer of a wafer

US Patent 8073240 · Granted Dec 6, 2011

Estimated economic value: $47,965,000 ⓘ

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