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Home › Methods of and apparatus for correlating gap value to meniscus stability in processing of a wafer surface by a recipe-controlled meniscus

Methods of and apparatus for correlating gap value to meniscus stability in processing of a wafer surface by a recipe-controlled meniscus

US Patent 8051863 · Granted Nov 8, 2011

Estimated economic value: $8,329,000 ⓘ

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