Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Loadlock designs and methods for using same

Loadlock designs and methods for using same

US Patent 8033769 · Granted Oct 11, 2011

Estimated economic value: $4,131,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Automated transfer of edge ring requiring rotational alignment2024
Apparatus for UV flowable dielectric2022
Fiducial-filtering automatic wafer centering process and associated system2020
Automated replacement of consumable parts using interfacing chambers2020
Edge ring centering method using ring dynamic alignment data2020
Anti-transient showerhead2019
Automated replacement of consumable parts using end effectors interfacing with p2019
Apparatus for UV flowable dielectric2019
Automated replacement of consumable parts using interfacing chambers2019
Verifying end effector flatness using electrical continuity2019
Automated replacement of consumable parts using end effectors interfacing with p2018
Configurable liquid precursor vaporizer2018