Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Automated replacement of consumable parts using end effectors interfacing with plasma processing system

Automated replacement of consumable parts using end effectors interfacing with plasma processing system

US Patent 10124492 · Granted Nov 13, 2018

Estimated economic value: $35,246,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Pulsing RF coils of a plasma chamber in reverse synchronization2025
Symmetric coupling of coil to direct-drive radiofrequency power supplies2025
RF pulsing within pulsing for semiconductor RF plasma processing2025
Systems and methods for achieving peak ion energy enhancement with a low angular2025
Bottom and middle edge rings2025
Moveable edge ring designs2025
Matchless plasma source for semiconductor wafer fabrication2025
Bottom and middle edge rings2024
Automated transfer of edge ring requiring rotational alignment2024
Multi-level parameter and frequency pulsing with a low angular spread2024
Edge ring arrangement with moveable edge rings2024
Edge ring arrangement with moveable edge rings2024