Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of fine patterning semiconductor device

Method of fine patterning semiconductor device

US Patent 8029688 · Granted Oct 4, 2011

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Display apparatus2025
Method of manufacturing semiconductor device using stationary laser module2025
Method of preparing shape-reconfigurable micropatterned polymer haptic material 2025
Methods of manufacturing semiconductor devices by etching active fins using etch2025
Wet etching apparatus2024
Pose estimation apparatus and method for robotic arm to grasp target based on mo2024
Wafer cleaning apparatus and wafer cleaning method using the same2024
Methods of manufacturing semiconductor devices by etching active fins using etch2023
Dry cleaning apparatus and dry cleaning method2023
Multi-chamber apparatus2023
Wafer cleaning apparatus and wafer cleaning method using the same2023
Semiconductor device manufacturing apparatus including laser module2023