Wafer cleaning apparatus and wafer cleaning method using the same

Assignee

• Samsung

Inventors

• Seung Min Shin (36 patents)
• Hun Jae Jang (13 patents)
• Seok Hoon Kim (61 patents)
• Young-Hoo Kim (35 patents)
• In-Gi Kim (19 patents)
• Tae Hong Kim (105 patents)
• Kun-Tack Lee (56 patents)
• Ji-Hoon Cha (30 patents)
• Yong-Jun Choi (51 patents)

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