Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gas mixing method realized by back diffusion in a PECVD system with showerhead

Gas mixing method realized by back diffusion in a PECVD system with showerhead

US Patent 8026157 · Granted Sep 27, 2011

Estimated economic value: $17,577,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Double-layer electrode for electro-optic liquid crystal lens2024
Advanced temperature monitoring system with expandable modular layout design2024
Method for testing burning performance of dark-colored cigarette using dark-colo2024
Substrate support cover for high-temperature corrosive environment2024
Lid stack for high frequency processing2023
High-temperature chamber and chamber component cleaning and maintenance method a2023
Device for forming a multi-flavor composite structure filter rod in one step and2023
Parameter sensing and computer modeling for gas delivery health monitoring2023
Device and method for detecting cigarette fly ash by gray-scale difference based2023
Reactor design for large-area VHF plasma processing with improved uniformity2022
Double-layer electrode for electro-optic liquid crystal lens2022
Lid stack for high frequency processing2022