Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Device consisting of at least one optical element

Device consisting of at least one optical element

US Patent 7995884 · Granted Aug 9, 2011

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Optical assembly, method for controlling an optical assembly, and projection exp2025
Projection objective including an optical device2025
Optical assembly, projection exposure apparatus and method2025
Compensation of creep effects in an imaging device2023
Optical imaging arrangement with a piezoelectric device2023
Mirror for a microlithographic projection exposure apparatus, and method for ope2021
Mirror, in particular for a microlithographic projection exposure apparatus2021
Optical imaging arrangement with a piezoelectric device2020
EUV exposure apparatus with reflective elements having reduced influence of temp2020
EUV exposure apparatus with reflective elements having reduced influence of temp2019
Optical module for a microlithography objective holding optical elements with su2019
Optical apparatus with adjustable action of force on an optical module2019