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Home › Methods of processing substrates, electrostatic carriers for retaining substrates for processing, and assemblies comprising electrostatic carriers having substrates electrostatically bonded thereto

Methods of processing substrates, electrostatic carriers for retaining substrates for processing, and assemblies comprising electrostatic carriers having substrates electrostatically bonded thereto

US Patent 7989022 · Granted Aug 2, 2011

Estimated economic value: $1,985,000 ⓘ

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