Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for positioning a target portion of a substrate with respect to a focal plane of a projection system

Method for positioning a target portion of a substrate with respect to a focal plane of a projection system

US Patent 7889357 · Granted Feb 15, 2011

Estimated economic value: $4,533,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for controlling a semiconductor manufacturing process2025
Metrology method and associated metrology and lithographic apparatuses2025
Lithographic apparatus and electrostatic clamp designs2024
Metrology method and associated metrology and lithographic apparatuses2024
Method of measuring an alignment mark or an alignment mark assembly, alignment s2022
Lithographic method2021
Lithographic method2021
Method of controlling a lithographic apparatus and device manufacturing method, 2021
Method of controlling a lithographic apparatus and device manufacturing method, 2020
Lithographic method2020
Position measuring method of an alignment target2019
Method of controlling a lithographic apparatus and device manufacturing method, 2019