Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of inspecting pattern and inspecting instrument

Method of inspecting pattern and inspecting instrument

US Patent 7876113 · Granted Jan 25, 2011

Estimated economic value: $103,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Alignment device and alignment method2025
Biological tissue image processing system, and machine learning method2023
Orientation device, production method for magnetic recording medium, and magneti2022
Defect inspection device and defect inspection method2017
Apparatus for inspecting defect with time/spatial division optical system2017
Inspection system2017
Apparatus and method for inspecting pattern defect2015
Field emission device2015
Method and apparatus for reviewing defects2015
Charged particle beam applied apparatus, and irradiation method2014
Inspection apparatus2014
Method and apparatus for inspecting patterns formed on a substrate2014