Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Temperature control for performing heat process in coating/developing system for resist film

Temperature control for performing heat process in coating/developing system for resist film

US Patent 7868270 · Granted Jan 11, 2011

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate processing apparatus and substrate processing method2023
Substrate processing apparatus and method of adjusting substrate processing appa2022
Substrate processing apparatus and substrate processing method2022
Thermal treatment apparatus, thermal treatment method, and non-transitory comput2021
Substrate processing apparatus and method of adjusting substrate processing appa2019
Substrate liquid processing apparatus, and control method of heater unit2019
Liquid heating unit, liquid processing apparatus including the same, and liquid 2014
Temperature control for performing heat process on resist film2010
Temperature control for performing heat process on resist film2010
Temperature control for performing heat process on resist film2010
Method and apparatus for heat processing of substrate2009
Coating film forming method and apparatus2009