Methods of manufacturing non-volatile memory devices having insulating layers treated using neutral beam irradiation

Assignee

• Samsung

Inventors

• Soo Doo Chae (47 patents)
• Chung-woo Kim (38 patents)
• Choong-Man Lee (15 patents)
• Yung-Hee Yvette Lee (17 patents)
• Chan-Jin Park (20 patents)
• Sung-Wook Hwang (41 patents)
• Jeong-Hee Han (15 patents)
• Do-Haing Lee (19 patents)
• Jin Seok Lee (97 patents)

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