Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Group II element alloys for protecting metal interconnects

Group II element alloys for protecting metal interconnects

US Patent 7759241 · Granted Jul 20, 2010

Estimated economic value: $9,455,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma enhanced atomic layer deposition of silicon-containing films2025
Dynamic precursor dosing for atomic layer deposition2025
Modulated atomic layer deposition2025
Multi-station semiconductor processing with independently adjustable pedestals2025
Impurity reduction in silicon-containing films2025
Ultrathin atomic layer deposition film accuracy thickness control2025
Source or drain structures with vertical trenches2025
Rapid tuning of critical dimension non-uniformity by modulating temperature tran2025
Integrated dry processes for patterning radiation photoresist patterning2025
Gapfill of variable aspect ratio features with a composite PEALD and PECVD metho2025
Temperature control of a multi-zone pedestal2025
Use of vacuum during transfer of substrates2025